JPH0543439Y2 - - Google Patents
Info
- Publication number
- JPH0543439Y2 JPH0543439Y2 JP1987135114U JP13511487U JPH0543439Y2 JP H0543439 Y2 JPH0543439 Y2 JP H0543439Y2 JP 1987135114 U JP1987135114 U JP 1987135114U JP 13511487 U JP13511487 U JP 13511487U JP H0543439 Y2 JPH0543439 Y2 JP H0543439Y2
- Authority
- JP
- Japan
- Prior art keywords
- arm
- displacement
- fixed part
- movable
- thin flexible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 claims description 30
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 101150105133 RRAD gene Proteins 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987135114U JPH0543439Y2 (en]) | 1987-09-03 | 1987-09-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987135114U JPH0543439Y2 (en]) | 1987-09-03 | 1987-09-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6440089U JPS6440089U (en]) | 1989-03-09 |
| JPH0543439Y2 true JPH0543439Y2 (en]) | 1993-11-01 |
Family
ID=31394458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987135114U Expired - Lifetime JPH0543439Y2 (en]) | 1987-09-03 | 1987-09-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543439Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100421024C (zh) | 2002-09-30 | 2008-09-24 | Asml荷兰有限公司 | 光刻装置及器件制造方法 |
-
1987
- 1987-09-03 JP JP1987135114U patent/JPH0543439Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6440089U (en]) | 1989-03-09 |
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